Fabrication of convex Si microstructures for hot embossing of microfluidic channels with 45° mirror

Yasuyuki Koide, Daisuke Teramoto, Satoshi Konishi, Taeko Ando
  • Japanese Journal of Applied Physics, June 2014, Japan Society of Applied Physics
  • DOI: 10.7567/jjap.53.06jm13

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http://dx.doi.org/10.7567/jjap.53.06jm13