Deformable silicone grating with submicrometer period

  • Takaaki Ishihara, Itsunari Yamada, Junichi Yanagisawa, Junji Nishii, Mitsunori Saito
  • Japanese Journal of Applied Physics, May 2014, Japan Society of Applied Physics
  • DOI: 10.7567/jjap.53.06je03

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http://dx.doi.org/10.7567/jjap.53.06je03