Low Temperature Deposition of SiNx Thin Films by the LPCVD Method

  • Zdenko Tijanić, Davor Ristić, Mile Ivanda, Ivančica Bogdanović-Radović, Marijan Marciuš, Mira Ristić, Ozren Gamulin, Svetozar Musić, Krešimir Furić, Alesandro Chiasera, Maurizio Ferrari, Giancarlo Cesare Righini
  • Croatica Chemica Acta, January 2012, Croatian Chemical Society
  • DOI: 10.5562/cca1970

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http://dx.doi.org/10.5562/cca1970

The following have contributed to this page: dr. Giancarlo C. Righini