What is it about?
We have developed a process that is able to detect, count, and map micropipes on SiC substrates. This process uses a polarized light microscope to scan the wafer.
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This page is a summary of: Automated Mapping of Micropipes in SiC Wafers Using Polarized-Light Microscope, Materials Science Forum, June 2018, Trans Tech Publications,
DOI: 10.4028/www.scientific.net/msf.924.527.
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