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The properties of silicon carbide films can be tailored using a simple method.
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This page is a summary of: SixCy Thin Films Deposited at Low Temperature by DC Dual Magnetron Sputtering: Effect of Power Supplied to Si and C Cathode Targets on Film Physicochemical Properties, Materials Science Forum, May 2012, Trans Tech Publications,
DOI: 10.4028/www.scientific.net/msf.717-720.197.
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