Reactive Sputtering Growth and Characterizations of InN Thin Films on Si Substrates

Maryam Amirhoseiny, Hassan Zainuriah, Ng Shashiong, Mohd Anas Ahmad
  • Advanced Materials Research, July 2012, Trans Tech Publications
  • DOI: 10.4028/www.scientific.net/amr.545.290

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http://dx.doi.org/10.4028/www.scientific.net/amr.545.290

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