What is it about?
Examined were PVD coatings of nanocomposite type: duplex AlXN3 (X=Cr) and duplex nACRo3, deposited by LARC and CERC technologies. Duplex coating is a modern technology, which combines plasma nitriding and PVD coating in one cycle. We focuses on the structural composition of cross sections of coating obtained by the Focused Ion Beam Scanning Electron Microscopes (FIB-SEMs) method. The focused ion beam (FIB) microscope has gained widespread use in fundamental materials studies and technological applications over the last several years because it offers both high-resolution imaging and flexible micromachining in a single platform.
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Why is it important?
The FIB analysis is based on highly focused ion beam which enables accurate machining of the investigated specimens and flexible processing at a micro/nanometric level. Cross sections of specimens obtained by FIB/SEMs document the arrangement of individual deposited nano-multilayers within the nanocomposite coatings and their EDS analysis in specific locations.
Perspectives
Coatings produced by physical deposition of metal or alloy vapours onto the surface of stressed parts meet the requirements of adequate quality of coated parts during their practical application, provided that the coated system (thin coating – substrate) had been deposited in compliance with the relevant requirements and meets the demands of practice. This stimulates further development of methods used for evaluation of properties of PVD coatings.
Dagmar Jakubeczyova
Institute of Materials Research Slovak Academy of Sciences
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This page is a summary of: The Analyse of Nanocomposite Thin Coatings Using Specimens Prepared by Focused Ion Beam Milling, Materials Science Forum, March 2017, Trans Tech Publications,
DOI: 10.4028/www.scientific.net/msf.891.579.
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