HCl Assisted Growth of Thick 4H-SiC Epilayers for Bipolar Devices

Birgit Kallinger, Christian Ehlers, Patrick Berwian, Mathias Rommel, Jochen Friedrich
  • Materials Science Forum, February 2014, Trans Tech Publications
  • DOI: 10.4028/www.scientific.net/msf.778-780.210
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The following have contributed to this page: Dr. Mathias Rommel