Al+ Implanted 4H-SiC: Improved Electrical Activation and Ohmic Contacts

  • Roberta Nipoti, Anders Hallén, Antonella Parisini, Francesco Moscatelli, Salvatore Vantaggio
  • Materials Science Forum, January 2013, Trans Tech Publications
  • DOI: 10.4028/www.scientific.net/msf.740-742.767

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http://dx.doi.org/10.4028/www.scientific.net/msf.740-742.767

The following have contributed to this page: dr Roberta Nipoti and Prof. Antonella A. Parisini