Current Analysis of Ion Implanted p+/n 4H-SiC Junctions: Post-Implantation Annealing in Ar Ambient

  • Roberta Nipoti, Fabio Bergamini, Francesco Moscatelli, Antonella Poggi, Mariaconcetta Canino, Giuseppe Bertuccio
  • Materials Science Forum, January 2006, Trans Tech Publications
  • DOI: 10.4028/www.scientific.net/msf.527-529.815

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http://dx.doi.org/10.4028/www.scientific.net/msf.527-529.815

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