Direct CTE Measurement Technique for the MEMS Materials

  • Chung Seog Oh, Sung Hoon Choa, Chang Seung Lee, Hak Joo Lee
  • Key Engineering Materials, December 2006, Trans Tech Publications
  • DOI: 10.4028/www.scientific.net/kem.326-328.199

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http://dx.doi.org/10.4028/www.scientific.net/kem.326-328.199