HF Transport Coefficients in Polymers Used for Microelectronic Applications

  • P. González-Aguirre, Hervé Fontaine, C. Beitia, R. Pastorello, J. Ohlsen, J. Lundgren
  • Defect and Diffusion Forum, April 2016, Trans Tech Publications
  • DOI: 10.4028/www.scientific.net/ddf.367.68

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http://dx.doi.org/10.4028/www.scientific.net/ddf.367.68