Study on the Influence of pH on MRR Based on Acidic Slurry in CMP of 304 Stainless Steel

  • Jian Xiu Su, Jian Guo Yao, Zhan Kui Wang, Li Jie Ma, Su Fang Fu
  • Advanced Materials Research, January 2016, Trans Tech Publications
  • DOI: 10.4028/www.scientific.net/amr.1136.327

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http://dx.doi.org/10.4028/www.scientific.net/amr.1136.327