Particle Swarm Optimization Based Technique for Deposition Parameters Optimization of Magnetron Sputtering Process

Norlina Mohd Sabri, Nor Diyana Md Sin, Siti Shafura Ash Karim, Mazidah Puteh, Mohamad Rusop
  • Advanced Materials Research, June 2015, Trans Tech Publications
  • DOI: 10.4028/www.scientific.net/amr.1109.486
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The following have contributed to this page: Dr Mazidah Puteh