A Perturbation Method for the 3D Finite Element Modeling of Electrostatically Driven MEMS

Mohamed Boutaayamou, Ruth V. Sabariego, Patrick Dular
  • Sensors, February 2008, MDPI AG
  • DOI: 10.3390/s8020994

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http://dx.doi.org/10.3390/s8020994

The following have contributed to this page: Mohamed Boutaayamou