A Perturbation Method for the 3D Finite Element Modeling of Electrostatically Driven MEMS

  • Mohamed Boutaayamou, Ruth V. Sabariego, Patrick Dular
  • Sensors, February 2008, MDPI AG
  • DOI: 10.3390/s8020994

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication


The following have contributed to this page: Mohamed Boutaayamou