Micromachined Aluminum Nitride Microphone Technology Development

  • Matthew Williams, Benjamin Griffin, Tiffany Reagan, James Underbrink, Mark Sheplak
  • January 2012, American Institute of Aeronautics and Astronautics (AIAA)
  • DOI: 10.2514/6.2012-258

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The following have contributed to this page: James R Underbrink