Multi-level interconnects for heterojunction bipolar transistor integrated circuit technologies

G.A. Patrizi, M.L. Lovejoy, R.P. Jr. Schneider, H.Q. Hou, P.M. Enquist
  • December 1995, Office of Scientific and Technical Information (OSTI)
  • DOI: 10.2172/212553

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http://dx.doi.org/10.2172/212553