Development of a Gas Jet-Type Z-Pinch EUV Light Source for Next-Generation Lithography

Inho SONG, R. Smruti MOHANTY, Masato WATANABE, Toru KAWAMURA, Akitoshi OKINO, Kazuhiko HORIOKA, Eiki HOTTA
  • Journal of Plasma and Fusion Research, January 2005, Japan Society of Plasma Science and Nuclear Fusion Research
  • DOI: 10.1585/jspf.81.647

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http://dx.doi.org/10.1585/jspf.81.647

The following have contributed to this page: Professor Akitoshi Okino