Pre-Oxidation Anneal Kinetics: Interface Degradation of Thin SIO2 Films on Silicon

  • J.C. Poler, E.A. Irene
  • MRS Proceedings, January 1992, Cambridge University Press
  • DOI: 10.1557/proc-259-93

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http://dx.doi.org/10.1557/proc-259-93

The following have contributed to this page: Jordan Poler