Structrual Characterization and Raman Scattering of Epitaxial Aluminum Nitride Thin Films on Si(111)

  • W. J. Meng, T. A. Perry, J. Heremans, Y. T. Cheng
  • MRS Proceedings, January 1992, Cambridge University Press
  • DOI: 10.1557/proc-242-469

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