What is it about?
Influence of argon incorporation on the chemical, electrical and mechanical properties of SiC films.
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Why is it important?
Few articles discuss the effects incorporation of argon on the properties of SiC films.
Perspectives
The novelty of this paper is to discuss the argon as a dopant of SiC films.
Prof. Dr. Mariana Amorim Fraga
Universidade Presbiteriana Mackenzie
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This page is a summary of: Argon incorporation on silicon carbide thin films deposited by bias co-sputtering technique, MRS Proceedings, January 2012, Cambridge University Press,
DOI: 10.1557/opl.2012.1147.
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