High-k ZrO2 Gate Dielectric on Strained-Si

  • S. Bhattacharya, S. K. Samanta, S. Chatterjee, John McCarthy, B. M. Armstrong, H. S. Gamble, C. K. Maiti, T. Perova, A. Moore
  • MRS Proceedings, January 2003, Cambridge University Press
  • DOI: 10.1557/proc-786-e3.22

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http://dx.doi.org/10.1557/proc-786-e3.22

The following have contributed to this page: Professor Tatiana Perova