Microstructural Evolution and Defects in Ultra-thin SIMOX Materials during Annealing

  • Jun Sik Jeoung, Rachel Evans, Supapan Seraphin
  • MRS Proceedings, January 2002, Cambridge University Press
  • DOI: 10.1557/proc-716-b1.2

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http://dx.doi.org/10.1557/proc-716-b1.2