A Study of Pt/AlN/6H-SiC MIS Structures for Device Applications

Margarita P. Thompson, Gregory W. Auner, Changhe Huang, James N. Hilfiker
  • MRS Proceedings, January 2000, Cambridge University Press
  • DOI: 10.1557/proc-622-t6.5.1
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http://dx.doi.org/10.1557/proc-622-t6.5.1

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