Erbium Alloyed Aluminum Nitride Films for Piezoelectric Applications

  • A. Kabulski, V. R. Pagán, D Korakakis
  • MRS Proceedings, January 2008, Cambridge University Press
  • DOI: 10.1557/proc-1129-v09-02

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http://dx.doi.org/10.1557/proc-1129-v09-02