Epitaxial Growth of SrTiO3 Thin Films on TiN/Si Substrates Using RF Sputtering

Chun Wang, Mark H Kryder
  • MRS Proceedings, January 2006, Cambridge University Press
  • DOI: 10.1557/proc-0966-t07-21

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http://dx.doi.org/10.1557/proc-0966-t07-21

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