How the sputtering process influence structural, optical, and electrical properties of Zn3N2 films?

  • Junjun Jia, Hironori Kamijo, Shin-ichi Nakamura, Yuzo Shigesato
  • MRS Communications, April 2018, Cambridge University Press
  • DOI: 10.1557/mrc.2018.50

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http://dx.doi.org/10.1557/mrc.2018.50