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This page is a summary of: Realization of Nanometer-scale Processing by Fluorocarbon Plasma Treatment of Polycarbonate and Its Potential Application to High-Density Memory, IEEJ Transactions on Sensors and Micromachines, January 2001, Institute of Electrical Engineers of Japan (IEE Japan),
DOI: 10.1541/ieejsmas.121.564.
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