Atmospheric Large Sized Remote Plasma Source for Surface Treatment

Ryota Sasaki, Wataru Kumagai, Hidekazu Miyahara, Ryuichi Shimada, Eiki Hotta, Akitoshi Okino
  • IEEJ Transactions on Fundamentals and Materials, January 2009, Institute of Electrical Engineers of Japan (IEE Japan)
  • DOI: 10.1541/ieejfms.129.903

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http://dx.doi.org/10.1541/ieejfms.129.903

The following have contributed to this page: Professor Akitoshi Okino