What is it about?

We review current nanotechnology methods to structure and sculpture materials in all three dimensions using different approaches.

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Why is it important?

3D nano-structures can be made more efficiently using inherently 3D capable fabrication methods.

Perspectives

One promising technique presented here is the deep-UV illumination which provides a better electron imaging in terms of resolution and provides material related contrast. After such electron imaging the very same sample can be further used for next processing or characterisation steps. We believe this will change metal coating of samples before taking scanning electron microscopy (SEM) images.

Professor Saulius Juodkazis
Swinburne University of Technology

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This page is a summary of: Tipping solutions: emerging 3D nano-fabrication/ -imaging technologies, Nanophotonics, June 2017, De Gruyter,
DOI: 10.1515/nanoph-2017-0008.
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