INFRARED LASER-INDUCED DECOMPOSITION OF tert-BUTYLSILANE FOR CHEMICAL VAPOUR DEPOSITION OF Si/C/H PHASES

Josef Pola, Josef Vtek, Zdenk Basti, Radek Fajgar, Susanne Graschy, Karl Hassler
  • Main Group Metal Chemistry, January 1999, De Gruyter
  • DOI: 10.1515/mgmc.1999.22.9.545
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The following have contributed to this page: Professor Josef - Pola