Deposition and characterisation of ultralow-stress ZnO thin films for application in FBAR-based gravimetric biosensors

L. García Gancedo, G.M. Ashley, X.B. Zhao, J. Pedrós, A.J. Flewitt, W.I. Milne, J.K. Luo, J.R. Lu, C.J.B. Ford, D. Zhang
  • International Journal of Nanomanufacturing, January 2011, Inderscience Publishers
  • DOI: 10.1504/ijnm.2011.042478

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