Nanomechanical characterisation of MEMS thin film materials

J.H. He, J.K. Luo, M.A. Hopcroft, H.R. Le, D.F. Moore
  • International Journal of Computational Materials Science and Surface Engineering, January 2009, Inderscience Publishers
  • DOI: 10.1504/ijcmsse.2009.027491

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http://dx.doi.org/10.1504/ijcmsse.2009.027491

The following have contributed to this page: Jack Luo (Jikui Luo)