Modification of a Plasma-Therm Inductively Coupled Plasma Supply to Enable Radio-Frequency Power Modulation

  • R. E. Ensman, J. W. Carr, G. M. Hieftje
  • Applied Spectroscopy, November 1983, SAGE Publications
  • DOI: 10.1366/0003702834634721

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The following have contributed to this page: Professor Gary M Hieftje