Optical properties and bandgap evolution of ALD HfSiOx films

Wen Yang, Michael Fronk, Yang Geng, Lin Chen, Qing-Qing Sun, Ovidiu D Gordan, Peng zhou, Dietrich RT Zahn, David Wei Zhang
  • Nanoscale Research Letters, February 2015, Springer Science + Business Media
  • DOI: 10.1186/s11671-014-0724-z
The author haven't finished explaining this publicationThe author haven't finished explaining this publication

The following have contributed to this page: Professor Dietrich RT Zahn