What is it about?
This paper proposes a very high sensitivity pressure sensor with a novel technique that employs a geometrical method for self-compensation of Young’s modulus reduction due to temperature increase, where a stronger spring with much larger length and width is anchored. Simulation results verify that the temperature variation related error in the compensated sensor is less than 0.66% of full-scale under 260° C of temperature range, which shows considerable improvement in comparison with literature.
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Why is it important?
Our simulation results verify that the temperature variation related error in the compensated sensor is less than 0.66% of full-scale under 260° C of temperature range, which shows considerable improvement in comparison with literature.
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This page is a summary of: Simulation of capacitive pressure sensor based on microelectromechanical systems technology, Proceedings of the Institution of Mechanical Engineers Part C Journal of Mechanical Engineering Science, April 2017, SAGE Publications,
DOI: 10.1177/0954406217706095.
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