Characterization of oxide barrier layers prepared by atomic layer deposition

  • Fa-Ta Tsai, Ching-Kong Chao, Kai-Jyun Jhong, Rwei-Ching Chang
  • Advances in Mechanical Engineering, July 2017, SAGE Publications
  • DOI: 10.1177/1687814017711809

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http://dx.doi.org/10.1177/1687814017711809

The following have contributed to this page: Professor Rwei-Ching Chang