Molecular dynamics simulation of subsurface damage mechanism during nanoscratching of single crystal silicon

Houfu Dai, Shaobo Li, Genyu Chen
  • Proceedings of the Institution of Mechanical Engineers Part J Journal of Engineering Tribology, March 2018, SAGE Publications
  • DOI: 10.1177/1350650118765351

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http://dx.doi.org/10.1177/1350650118765351

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