Yaw error correction of ultra-precision stage for scanning beam interference lithography systems

  • Sen Lu, Kaiming Yang, Yu Zhu, Leijie Wang, Ming Zhang, Jin Yang
  • Proceedings of the Institution of Mechanical Engineers Part I Journal of Systems and Control Engineering, April 2018, SAGE Publications
  • DOI: 10.1177/0959651818766197

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http://dx.doi.org/10.1177/0959651818766197