Design of seal ring with rectangular grooves for gas isolation in Nanoimprint Lithography

Peng Wei, Ma Liuhong, Li Mengke, Zhong Yinghui, Shangguan Lei, Cai Yuwei, Duan Zhiyong
  • Proceedings of the Institution of Mechanical Engineers Part C Journal of Mechanical Engineering Science, March 2018, SAGE Publishing
  • DOI: 10.1177/0954406218763683
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