A robust control approach for MEMS capacitive micromachined ultrasonic transducer

Yi Qin, Weijie Sun, John TW Yeow
  • Transactions of the Institute of Measurement and Control, March 2018, SAGE Publications
  • DOI: 10.1177/0142331218757860
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http://dx.doi.org/10.1177/0142331218757860

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