Finite Element Modeling of Electrostatic MEMS Including the Impact of Fringing Field Effects on Forces

Mohamed Boutaayamou, Ruth V. Sabariego, Patrick Dular
  • Sensor Letters, February 2008, American Scientific Publishers
  • DOI: 10.1166/sl.2008.006

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http://dx.doi.org/10.1166/sl.2008.006

The following have contributed to this page: Mohamed Boutaayamou