Ta2O5Thin Films for Capacitive RF MEMS Switches

Anna Persano, Fabio Quaranta, Adriano Cola, Antonietta Taurino, Giorgio De Angelis, Romolo Marcelli, Pietro Siciliano
  • Journal of Sensors, January 2010, Hindawi Publishing Corporation
  • DOI: 10.1155/2010/487061

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The following have contributed to this page: Dr Romolo Marcelli