Concentration-Dependent Wet Etching Behaviors of Ga-Doped ZnO Films Sputter-Deposited at Room Temperature Using Formic and Citric Acids

Dong-Kyoon Lee, Ji-Hye Kwon, Young Soo Lim, Heesun Yang
  • Journal of The Electrochemical Society, January 2010, The Electrochemical Society
  • DOI: 10.1149/1.3429217

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