Temperature Dependence of Defect Evolution and Distribution in Thermally Cycled Cu-TSVs

  • J. B. Marro, C. A. Okoro, Y. S. Obeng, K. A. Richardson, K. Chamma
  • ECS Transactions, March 2014, The Electrochemical Society
  • DOI: 10.1149/06102.0177ecst

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http://dx.doi.org/10.1149/06102.0177ecst