Characterization of Submicron-scale Periodic Grooves by Grazing Incidence Ultra-small-angle X-ray Scattering

  • Yoshiyasu Ito, Katsuhiko Inaba, Kazuhiko Omote, Yasuo Wada, Susumu Ikeda
  • Japanese Journal of Applied Physics, August 2007, Japan Society of Applied Physics
  • DOI: 10.1143/jjap.46.l773

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http://dx.doi.org/10.1143/jjap.46.l773

The following have contributed to this page: Dr Susumu Ikeda