Characteristics of Xenon Capillary Z-Pinch Extreme Ultraviolet Lithography Source Driven by DifferentdI/dtDischarge Current Pulses

Inho Song, Kazuhiro Iwata, Yusuke Homma, Smruti Ranjan Mohanty, Masato Watanabe, Toru Kawamura, Akitoshi Okino, Koichi Yasuoka, Kazuhiko Horioka, Eiki Hotta
  • Japanese Journal of Applied Physics, December 2005, Japan Society of Applied Physics
  • DOI: 10.1143/jjap.44.8640

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The following have contributed to this page: Professor Akitoshi Okino