Investigation of porosity and atmospheric gas diffusion in microcrystalline silicon fabricated at high growth rates 1

S. Michard, M. Meier, U. Zastrow, O. Astakhov, F. Finger
  • Canadian Journal of Physics, July 2014, Canadian Science Publishing
  • DOI: 10.1139/cjp-2013-0636

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http://dx.doi.org/10.1139/cjp-2013-0636