Impact of doped microcrystalline silicon oxide layers on crystalline silicon surface passivation 1

K. Ding, U. Aeberhard, A. Lambertz, V. Smirnov, B. Holländer, F. Finger, U. Rau
  • Canadian Journal of Physics, July 2014, Canadian Science Publishing
  • DOI: 10.1139/cjp-2013-0627

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http://dx.doi.org/10.1139/cjp-2013-0627