Probing periodic oscillations in a silane dusty plasma in a very high-frequency plasma enhanced chemical vapor deposition process 1

A. Mohan, C.M. van der Wel, R.E.I. Schropp, J.K. Rath
  • Canadian Journal of Physics, July 2014, Canadian Science Publishing
  • DOI: 10.1139/cjp-2013-0611

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http://dx.doi.org/10.1139/cjp-2013-0611